| Id |
Subject |
Object |
Predicate |
Lexical cue |
| T577 |
0-87 |
Sentence |
denotes |
Table 4 Results of the Scotch tape metal adhesion tests before and after heat cycling. |
| T578 |
88-220 |
Sentence |
denotes |
Here, + means passing the tape test, − means failing the tape test, and +/− means that not all test structures failed the tape test. |
| T579 |
221-262 |
Sentence |
denotes |
Material Method Tape Test Initial TCR |
| T580 |
263-297 |
Sentence |
denotes |
Before After Resistance [Ω] K−1 |
| T581 |
298-333 |
Sentence |
denotes |
Au Evaporation + − 5.0 0.00161 |
| T582 |
334-368 |
Sentence |
denotes |
Au Sputtering + + 8.2 0.00192 |
| T583 |
369-409 |
Sentence |
denotes |
Pt Evaporation + + 400 ∗ −0.00440 ∗ |
| T584 |
410-446 |
Sentence |
denotes |
Pt Sputtering + +/− 6.8 0.00207 |
| T585 |
447-537 |
Sentence |
denotes |
* These results are not reliable as the shadow mask gave contamination in the metal track. |
