Table 4  Results of the Scotch tape metal adhesion tests before and after heat cycling. Here, + means passing the tape test, − means failing the tape test, and +/− means that not all test structures failed the tape test.
Material  Method  Tape Test  Initial  TCR
Before  After  Resistance [Ω]  K−1
Au  Evaporation  +  −  5.0  0.00161
Au  Sputtering  +  +  8.2  0.00192
Pt  Evaporation  +  +  400 ∗  −0.00440 ∗
Pt  Sputtering  +  +/−  6.8  0.00207
* These results are not reliable as the shadow mask gave contamination in the metal track.