| Id |
Subject |
Object |
Predicate |
Lexical cue |
| T228 |
0-135 |
Sentence |
denotes |
The heater pattern is divided over two shadow masks to minimize the length of the narrow Mo tracks in between the meandering structure. |
| T229 |
136-186 |
Sentence |
denotes |
This prevents curvature due to intrinsic stresses. |
| T230 |
187-282 |
Sentence |
denotes |
See Figure 7 for the outlines of both shadow masks, together with the resulting pattern on COC. |
| T231 |
283-381 |
Sentence |
denotes |
The use of two shadow masks will give a metal track in which small parts has the double thickness. |
| T232 |
382-418 |
Sentence |
denotes |
Here, the temperature will be lower. |
| T233 |
419-544 |
Sentence |
denotes |
The system is designed such that these thicker parts are outside the reaction chamber and temperature control chamber region. |
