PMC:7143804 / 53802-54793 JSONTXT 7 Projects

Annnotations TAB TSV DIC JSON TextAE

Id Subject Object Predicate Lexical cue
T465 0-11 Sentence denotes Appendix C.
T466 12-28 Sentence denotes TCR Measurements
T467 29-194 Sentence denotes The two subsections below show two effects on the TCR measurements, i.e., the effect of thermal annealing during the first temperature cycle and the effect of aging.
T468 196-209 Sentence denotes Appendix C.1.
T469 210-227 Sentence denotes Thermal Annealing
T470 228-316 Sentence denotes The graph below is an example of the measured thermal annealing of a metal layer on COC.
T471 317-414 Sentence denotes Here, only the graph for evaporated Au is shown, but all except evaporated Pt show this behavior.
T472 415-470 Sentence denotes Evaporated Pt had some contaminants in the metal track.
T473 471-519 Sentence denotes This is most probably caused by the shadow mask.
T474 520-582 Sentence denotes Figure A2 Thermal annealing of an evaporated 100 nm Au layer.
T475 584-597 Sentence denotes Appendix C.2.
T476 598-603 Sentence denotes Aging
T477 604-712 Sentence denotes The layer analyzed in Figure A2 is stored for two weeks in ambient conditions and the TCR is analyzed again.
T478 713-803 Sentence denotes From the graph it is visible that the aging has some effect on the TCR of the metal layer.
T479 804-888 Sentence denotes Figure A3 The effect of two weeks aging in ambient conditions on a 100 nm Au layer.
T480 889-991 Sentence denotes The TCR of the as deposited layer is 0.00161 K−1 and the TCR of the two week old layer is 0.00224 K−1.