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PMC:7143804 / 33006-36592 JSONTXT 9 Projects

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Id Subject Object Predicate Lexical cue
T254 0-4 Sentence denotes 3.3.
T255 5-19 Sentence denotes Metal Adhesion
T256 20-135 Sentence denotes To get reliable heaters, four possible options are investigated for their adhesion properties to the COC substrate.
T257 136-322 Sentence denotes The adhesion of Au and Pt deposited by either evaporation or DC magnetron sputtering is investigated using the Scotch tape test [60,61] before and after temperature cycling up to 100 °C.
T258 323-581 Sentence denotes Test patterns consisting of rectangular metal strips of 2 mm by 14 mm are fabricated by depositing 100 nm of metal using a hand-made shadow mask made out of DuPont Kapton® HN polyimide film of 0.05 mm thickness (RS Components B.V., Haarlem, The Netherlands).
T259 582-634 Sentence denotes See Table 4 for the results of the Scotch tape test.
T260 635-950 Sentence denotes Normally, heating up a glass or Si substrate with thin metal strips while measuring the resistance (RT) in these metal strips at certain temperature intervals (T) yields directly a linear relation, which can be fitted with RT/R0=1+αT−T0 [64], in which α is the the temperature coefficient of resistance (TCR) value.
T261 951-1117 Sentence denotes The thin-film TCR values have to be measured as they differ from the bulk TCR values due to its dependency on layer purity, grain size, and deposition method [65,66].
T262 1118-1298 Sentence denotes Belser and Hicklin also lists other attributes, such as surface roughness, porosity, and adsorbed materials present in or on the substrate which could influence the TCR value [64].
T263 1299-1368 Sentence denotes The bulk TCR values are 0.0034 K−1 and 0.0037 K−1 for Au and Pt [67].
T264 1369-1490 Sentence denotes The TCR characterizations of the metal strips on a COC substrate did not yield trustworthy TCR values at the first cycle.
T265 1491-1656 Sentence denotes The first temperature cycle can be seen as a kind of thermal annealing, and therefore gives an hysteresis in the graphs, as can be seen in Figure A2 in Appendix C.1.
T266 1657-1730 Sentence denotes After this first cycle, the values more or less show the linear behavior.
T267 1731-1856 Sentence denotes The resulting TCR of this linear part is in agreement with the TCR ranges of Belser and Hicklin [64] and is given in Table 4.
T268 1857-1992 Sentence denotes Belser and Hicklin used for their experiments substrates with coefficients of linear thermal expansion lower than 1.2 × 10−5 °C−1 [64].
T269 1993-2110 Sentence denotes The coefficient of linear thermal expansion for Au and Pt are 1.42 × 10−5 K−1 and 0.88 × 10−5 K−1, respectively [68].
T270 2111-2208 Sentence denotes COC of the grade TOPAS 6017 has a coefficient of linear thermal expansion of 6.0 × 10−5 K−1 [42].
T271 2209-2303 Sentence denotes This mismatch in coefficients of linear thermal expansion can give strain in the metal layers.
T272 2304-2461 Sentence denotes Both Au [69,70,71] and Pt [72,73,74] are used as strain-sensitive gauges, and thus are sensitive to strain-induced geometry changes due to thermal expansion.
T273 2462-2531 Sentence denotes Another effect influencing the TCR value of the metal layer is aging.
T274 2532-2653 Sentence denotes As can be seen in Figure A3 in Appendix C.2, the TCR value already changes after two weeks storing in ambient conditions.
T275 2654-2722 Sentence denotes This could be due to adsorbed materials present on the surface [64].
T276 2723-2839 Sentence denotes However, in this device, the TCR is not of importance as the metal structure will not be used as temperature sensor.
T277 2840-2934 Sentence denotes Real-time temperature sensing is done using a thermocouple in the temperature monitor chamber.
T278 2935-3075 Sentence denotes The resistance of the heater structure changes with temperature; thus, the dissipated power changes when a fixed voltage or current is used.
T279 3076-3200 Sentence denotes However, the results in Section 3.4 show a 25 h stability test with a constant input potential and only a ±1.5 °C deviation.
T280 3201-3303 Sentence denotes The TCR can become more important when other (higher) temperatures are required for the amplification.
T281 3304-3454 Sentence denotes Based on the results in Table 4, the choice of heater material and deposition method to be used in the actual device is Au deposited using sputtering.
T282 3455-3586 Sentence denotes Sputtering is an industrial-scale technique that is already being used in, for example, the car mirror and headlight industry [75].