
PMC:7143804 / 59969-60099
Annnotations
LitCovid-PubTator
{"project":"LitCovid-PubTator","denotations":[{"id":"483","span":{"begin":48,"end":50},"obj":"Chemical"}],"attributes":[{"id":"A483","pred":"tao:has_database_id","subj":"483","obj":"MESH:D006046"}],"namespaces":[{"prefix":"Tax","uri":"https://www.ncbi.nlm.nih.gov/taxonomy/"},{"prefix":"MESH","uri":"https://id.nlm.nih.gov/mesh/"},{"prefix":"Gene","uri":"https://www.ncbi.nlm.nih.gov/gene/"},{"prefix":"CVCL","uri":"https://web.expasy.org/cellosaurus/CVCL_"}],"text":"Figure 11 Characterization of the 100 nm thick Au heater structure deposited by sputtering using the two sequential shadow masks."}
LitCovid-PD-CLO
{"project":"LitCovid-PD-CLO","denotations":[{"id":"T455","span":{"begin":7,"end":9},"obj":"http://purl.obolibrary.org/obo/CLO_0053733"}],"text":"Figure 11 Characterization of the 100 nm thick Au heater structure deposited by sputtering using the two sequential shadow masks."}
LitCovid-PD-CHEBI
{"project":"LitCovid-PD-CHEBI","denotations":[{"id":"T50722","span":{"begin":48,"end":50},"obj":"Chemical"}],"attributes":[{"id":"A49447","pred":"chebi_id","subj":"T50722","obj":"http://purl.obolibrary.org/obo/CHEBI_29287"}],"text":"Figure 11 Characterization of the 100 nm thick Au heater structure deposited by sputtering using the two sequential shadow masks."}
LitCovid-sentences
{"project":"LitCovid-sentences","denotations":[{"id":"T540","span":{"begin":0,"end":130},"obj":"Sentence"}],"namespaces":[{"prefix":"_base","uri":"http://pubannotation.org/ontology/tao.owl#"}],"text":"Figure 11 Characterization of the 100 nm thick Au heater structure deposited by sputtering using the two sequential shadow masks."}