| Id |
Subject |
Object |
Predicate |
Lexical cue |
| T520 |
0-158 |
Sentence |
denotes |
Figure 5 COMSOL Multiphysics 5.3a finite element method heat transfer simulations of a 0.75 mm deep chamber with different heater widths and heater spacings. |
| T521 |
159-323 |
Sentence |
denotes |
Panel (a) shows the schematics with the materials indicated in the figure and the heaters exaggerated in red (they are 1 dimensional lines in the simulation model). |
| T522 |
324-399 |
Sentence |
denotes |
Panel (b) shows the case for 0.3 mm heater width and 0.3 mm heater spacing. |
| T523 |
400-475 |
Sentence |
denotes |
Panel (c) shows the case for 0.3 mm heater width and 2.0 mm heater spacing. |
| T524 |
476-551 |
Sentence |
denotes |
The scale bar in panel (d) is in °C and applies to both panels (b) and (c). |
