PMC:7143804 / 54333-54384 JSONTXT

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{"project":"LitCovid-PD-CHEBI","denotations":[{"id":"T29877","span":{"begin":42,"end":44},"obj":"Chemical"}],"attributes":[{"id":"A73232","pred":"chebi_id","subj":"T29877","obj":"http://purl.obolibrary.org/obo/CHEBI_29287"}],"text":"Thermal annealing of an evaporated 100 nm Au layer."}