PMC:7143804 / 24783-25110
Annnotations
LitCovid-PD-CLO
{"project":"LitCovid-PD-CLO","denotations":[{"id":"T173","span":{"begin":65,"end":66},"obj":"http://purl.obolibrary.org/obo/CLO_0001020"},{"id":"T174","span":{"begin":119,"end":121},"obj":"http://purl.obolibrary.org/obo/CLO_0037161"},{"id":"T175","span":{"begin":239,"end":240},"obj":"http://purl.obolibrary.org/obo/CLO_0001020"}],"text":"The deposition methods studied are DC magnetron sputtering using a custom-build machine (Techno Centrum voor Onderwijs en Onderzoek, University of Twente, Enschede, The Netherlands) and e-beam physical vapor deposition (evaporation) using a Balzers BAK 600 CE (Oerlikon Balzers limited, Balzers, Principality of Liechtenstein)."}
LitCovid-PD-CHEBI
{"project":"LitCovid-PD-CHEBI","denotations":[{"id":"T166","span":{"begin":119,"end":121},"obj":"Chemical"},{"id":"T167","span":{"begin":257,"end":259},"obj":"Chemical"}],"attributes":[{"id":"A166","pred":"chebi_id","subj":"T166","obj":"http://purl.obolibrary.org/obo/CHEBI_30347"},{"id":"A167","pred":"chebi_id","subj":"T167","obj":"http://purl.obolibrary.org/obo/CHEBI_3663"}],"text":"The deposition methods studied are DC magnetron sputtering using a custom-build machine (Techno Centrum voor Onderwijs en Onderzoek, University of Twente, Enschede, The Netherlands) and e-beam physical vapor deposition (evaporation) using a Balzers BAK 600 CE (Oerlikon Balzers limited, Balzers, Principality of Liechtenstein)."}
LitCovid-sentences
{"project":"LitCovid-sentences","denotations":[{"id":"T192","span":{"begin":0,"end":327},"obj":"Sentence"}],"namespaces":[{"prefix":"_base","uri":"http://pubannotation.org/ontology/tao.owl#"}],"text":"The deposition methods studied are DC magnetron sputtering using a custom-build machine (Techno Centrum voor Onderwijs en Onderzoek, University of Twente, Enschede, The Netherlands) and e-beam physical vapor deposition (evaporation) using a Balzers BAK 600 CE (Oerlikon Balzers limited, Balzers, Principality of Liechtenstein)."}