PMC:7143804 / 24388-25694 JSONTXT

{"target":"https://pubannotation.org/docs/sourcedb/PMC/sourceid/7143804","sourcedb":"PMC","sourceid":"7143804","source_url":"https://www.ncbi.nlm.nih.gov/pmc/7143804","text":"A metal is deposited on the backside of the substrate using two laser-cut metal (Mo) shadow masks to outline the shape of the resistive heater (see Figure 4d). Mo has a smaller coefficient of thermal expansion than stainless steel, and therefore gives less deformation during the deposition. Metals of interest are Au or Pt, which are commonly used metals to function as resistive heaters [54]. The deposition methods studied are DC magnetron sputtering using a custom-build machine (Techno Centrum voor Onderwijs en Onderzoek, University of Twente, Enschede, The Netherlands) and e-beam physical vapor deposition (evaporation) using a Balzers BAK 600 CE (Oerlikon Balzers limited, Balzers, Principality of Liechtenstein). Both deposition methods are capable of large-scale production, which will lower the production costs in the large-volume production stage. The metal and deposition method will be chosen based on the metal adhesion performances on the COC substrate, which is studied using the Scotch tape test [60,61], and the resistance versus temperature behavior in the range 20 °C to 100 °C, which is measured in a Heraeus T5025 oven (Heraeus Holding GmbH, Hanau, Germany), customized with electrical readout and connected to a custom-build National Instruments LabVIEW program (Austin, TX, USA).","tracks":[{"project":"LitCovid-PubTator","denotations":[{"id":"164","span":{"begin":2,"end":7},"obj":"Chemical"},{"id":"165","span":{"begin":74,"end":79},"obj":"Chemical"},{"id":"166","span":{"begin":315,"end":317},"obj":"Chemical"},{"id":"167","span":{"begin":321,"end":323},"obj":"Chemical"},{"id":"168","span":{"begin":866,"end":871},"obj":"Chemical"},{"id":"169","span":{"begin":922,"end":927},"obj":"Chemical"},{"id":"170","span":{"begin":28,"end":36},"obj":"Disease"},{"id":"171","span":{"begin":1123,"end":1132},"obj":"CellLine"}],"attributes":[{"id":"A164","pred":"tao:has_database_id","subj":"164","obj":"MESH:D008670"},{"id":"A165","pred":"tao:has_database_id","subj":"165","obj":"MESH:D008670"},{"id":"A166","pred":"tao:has_database_id","subj":"166","obj":"MESH:D006046"},{"id":"A167","pred":"tao:has_database_id","subj":"167","obj":"MESH:D010984"},{"id":"A168","pred":"tao:has_database_id","subj":"168","obj":"MESH:D008670"},{"id":"A169","pred":"tao:has_database_id","subj":"169","obj":"MESH:D008670"},{"id":"A171","pred":"tao:has_database_id","subj":"171","obj":"CVCL:S575"},{"subj":"164","pred":"source","obj":"LitCovid-PubTator"},{"subj":"165","pred":"source","obj":"LitCovid-PubTator"},{"subj":"166","pred":"source","obj":"LitCovid-PubTator"},{"subj":"167","pred":"source","obj":"LitCovid-PubTator"},{"subj":"168","pred":"source","obj":"LitCovid-PubTator"},{"subj":"169","pred":"source","obj":"LitCovid-PubTator"},{"subj":"170","pred":"source","obj":"LitCovid-PubTator"},{"subj":"171","pred":"source","obj":"LitCovid-PubTator"}],"namespaces":[{"prefix":"Tax","uri":"https://www.ncbi.nlm.nih.gov/taxonomy/"},{"prefix":"MESH","uri":"https://id.nlm.nih.gov/mesh/"},{"prefix":"Gene","uri":"https://www.ncbi.nlm.nih.gov/gene/"},{"prefix":"CVCL","uri":"https://web.expasy.org/cellosaurus/CVCL_"}]},{"project":"LitCovid-PD-UBERON","denotations":[{"id":"T4","span":{"begin":768,"end":773},"obj":"Body_part"}],"attributes":[{"id":"A4","pred":"uberon_id","subj":"T4","obj":"http://purl.obolibrary.org/obo/UBERON_0002542"},{"subj":"T4","pred":"source","obj":"LitCovid-PD-UBERON"}]},{"project":"LitCovid-PD-CLO","denotations":[{"id":"T168","span":{"begin":0,"end":1},"obj":"http://purl.obolibrary.org/obo/CLO_0001020"},{"id":"T169","span":{"begin":81,"end":83},"obj":"http://purl.obolibrary.org/obo/CLO_0007815"},{"id":"T170","span":{"begin":160,"end":162},"obj":"http://purl.obolibrary.org/obo/CLO_0007815"},{"id":"T171","span":{"begin":163,"end":166},"obj":"http://purl.obolibrary.org/obo/CLO_0051582"},{"id":"T172","span":{"begin":167,"end":168},"obj":"http://purl.obolibrary.org/obo/CLO_0001020"},{"id":"T173","span":{"begin":460,"end":461},"obj":"http://purl.obolibrary.org/obo/CLO_0001020"},{"id":"T174","span":{"begin":514,"end":516},"obj":"http://purl.obolibrary.org/obo/CLO_0037161"},{"id":"T175","span":{"begin":634,"end":635},"obj":"http://purl.obolibrary.org/obo/CLO_0001020"},{"id":"T176","span":{"begin":1011,"end":1015},"obj":"http://purl.obolibrary.org/obo/UBERON_0000473"},{"id":"T177","span":{"begin":1123,"end":1124},"obj":"http://purl.obolibrary.org/obo/CLO_0001020"},{"id":"T178","span":{"begin":1236,"end":1237},"obj":"http://purl.obolibrary.org/obo/CLO_0001020"},{"id":"T179","span":{"begin":1260,"end":1271},"obj":"http://purl.obolibrary.org/obo/OBI_0000968"}],"attributes":[{"subj":"T168","pred":"source","obj":"LitCovid-PD-CLO"},{"subj":"T169","pred":"source","obj":"LitCovid-PD-CLO"},{"subj":"T170","pred":"source","obj":"LitCovid-PD-CLO"},{"subj":"T171","pred":"source","obj":"LitCovid-PD-CLO"},{"subj":"T172","pred":"source","obj":"LitCovid-PD-CLO"},{"subj":"T173","pred":"source","obj":"LitCovid-PD-CLO"},{"subj":"T174","pred":"source","obj":"LitCovid-PD-CLO"},{"subj":"T175","pred":"source","obj":"LitCovid-PD-CLO"},{"subj":"T176","pred":"source","obj":"LitCovid-PD-CLO"},{"subj":"T177","pred":"source","obj":"LitCovid-PD-CLO"},{"subj":"T178","pred":"source","obj":"LitCovid-PD-CLO"},{"subj":"T179","pred":"source","obj":"LitCovid-PD-CLO"}]},{"project":"LitCovid-PD-CHEBI","denotations":[{"id":"T160","span":{"begin":81,"end":83},"obj":"Chemical"},{"id":"T161","span":{"begin":160,"end":162},"obj":"Chemical"},{"id":"T162","span":{"begin":315,"end":317},"obj":"Chemical"},{"id":"T163","span":{"begin":321,"end":323},"obj":"Chemical"},{"id":"T165","span":{"begin":349,"end":355},"obj":"Chemical"},{"id":"T166","span":{"begin":514,"end":516},"obj":"Chemical"},{"id":"T167","span":{"begin":652,"end":654},"obj":"Chemical"},{"id":"T168","span":{"begin":957,"end":960},"obj":"Chemical"}],"attributes":[{"id":"A160","pred":"chebi_id","subj":"T160","obj":"http://purl.obolibrary.org/obo/CHEBI_28685"},{"id":"A161","pred":"chebi_id","subj":"T161","obj":"http://purl.obolibrary.org/obo/CHEBI_28685"},{"id":"A162","pred":"chebi_id","subj":"T162","obj":"http://purl.obolibrary.org/obo/CHEBI_29287"},{"id":"A163","pred":"chebi_id","subj":"T163","obj":"http://purl.obolibrary.org/obo/CHEBI_33364"},{"id":"A164","pred":"chebi_id","subj":"T163","obj":"http://purl.obolibrar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