PMC:2992534 / 4135-4342 JSONTXT

{"target":"http://pubannotation.org/docs/sourcedb/PMC/sourceid/2992534","sourcedb":"PMC","sourceid":"2992534","source_url":"http://www.ncbi.nlm.nih.gov/pmc/2992534","text":"Figure 1 Veeco active probe. Cantilever consists of a Si substrate (thickness = 4 μm) supporting a ZnO stack (0.25 μm Ti/Au, 3.5 μm ZnO, and 0.25 μm Ti/Au). Other relevant dimensions are shown in microns. ","tracks":[]}