Schematic top views (top row) and cross-sectional representations (bottom row) of the full fabrication process. In panel (a) the pristine COC substrate is shown as step 0. Then, in panel (b) the first step is shown, i.e., the milling of the reaction chamber and temperature monitor chamber. In panel (c), the cyclohexane vapor post-treatment is shown. Then, the substrate is flipped and metal is deposited as step 3 in panel (d). The substrate is flipped back and the microfluidic structure is closed using PCR foil in panel (e). The images are not on scale and out of proportion for clarity reasons.