when only 50 pieces are fabricated [41]. This price is expected to drop drastically when large numbers are fabricated.
A metal is deposited on the backside of the substrate using two laser-cut metal (Mo) shadow masks to outline the shape of the resistive heater (see Figure 4d). Mo has a smaller coefficient of thermal expansion than stainless steel, and therefore gives less deformation during the deposition. Metals of interest are Au or Pt,