Figure 5  COMSOL Multiphysics 5.3a finite element method heat transfer simulations of a 0.75 mm deep chamber with different heater widths and heater spacings. Panel (a) shows the schematics with the materials indicated in the figure and the heaters exaggerated in red (they are 1 dimensional lines in the simulation model). Panel (b) shows the case for 0.3 mm heater width and 0.3 mm heater spacing. Panel (c) shows the case for 0.3 mm heater width and 2.0 mm heater spacing. The scale bar in panel (d) is in °C and applies to both panels (b) and (c).